Flash UV Lamps
With the same basic properties as super high pressure mercury lamps, flash UV lamps are developed as a light source for step-and-repeat wafer exposure devices. They operate at higher power during exposure than during stand-by, reducing heat and energy consumption.
Ushio Code |
Lamppower idling / flashing |
|---|---|
USH-500FU |
200 / 500 |
USH-510FU |
200 / 500 |
USH-1000FA |
700 / 1000 |
USH-1000FG |
700 / 1000 |
USH-1000FGI |
700 / 1000 |
USH-1000FN |
700 / 1000 |
USH-1000FNL |
700 / 1000 |
USH-1002FA |
750 / 1000 |
USH-1002FAL |
750 / 1000 |
USH-1002FG |
700 / 1000 |
USH-1002FN |
700 / 1000 |
USH-1002FNI |
700 / 1000 |
USH-1002FNIL |
700 / 1000 |
USH-1002FNL |
700 / 1000 |
USH-1003FGI |
700 / 1000 |
USH-1000FAL |
750 / 1000 |
USH-1002FAL |
750 / 1000 |
USH-1003FA |
750 / 1000 |
USH-1003FAL |
750 / 1000 |
USH-1003FSIL |
750 / 1000 |
USH-3501FN |
3000 / 3500 |
USH-1000FCL |
700 / 1000 |
USH-1000FCL3 |
700 / 1000 |
USH-1000FGIL |
700 / 1000 |
USH-1000FGIL2 |
700 / 1000 |
USH-1000FGL3 |
700 / 1000 |
USH-1002FCL |
700 / 1000 |
USH-1002FCL3 |
700 / 1000 |
USH-1002FGL3 |
700 / 1000 |
USH-1003FGIL2 |
700 / 1000 |