Excimer Lamps


Excimer brochure

Cleaning is an inevitable process in semiconductor manufacturing to remove chemical and organic contamination from substrates. VUV light cleaning enables to accommodate ultra fine patterns and higher levels of integration as well as to improve productivity. Excimer lamps are also widely used in the LCD industry. They are widely applied for wettability enhancement of spin-on glass (SOG) and spin-on dielectric (SOD) films, surface treatment, optical ashing and chemical process stimulation.

Ushio Code

Radiaton area

SUS-63

230 mm / 230 mm

SUS-100

347 mm / 347 mm

SUS-128

170 mm / 170 mm

UER20H-172V

Ø 28 mm

UER20H-222

Ø 28 mm

UER20H-222V

Ø 28 mm

UER20H308

Ø 28 mm

UER20H-308V

Ø 28 mm